Journal: Scientific Reports
Article Title: Thermal insensitivity of an ENZ-ITO clad, hollow-core micro-ring resonator
doi: 10.1038/s41598-024-82147-7
Figure Lengend Snippet: Steps to fabricate the hollow-core resonators. ( a ), The IP-Dip core is printed from a 3D CAD model using the Nanoscribe Photonic Professional GT2. ( b ), A sacrificial Si layer is deposited onto the core. The substrate was mounted onto a rotating stage at an angle steep enough to ensure even coverage around the MRR and to make sure adequate coverage inside the drain channels. The ITO layer was then deposited in a similar way, but at a shallow angle to make sure the sacrificial Si layer was still exposed in the drain. ( c ), The Si layer was removed with a XeF2 etch and then the IP-Dip core was ashed and removed via an annealing step. This final anneal step simultaneously processed the ITO to achieve an ENZ condition.
Article Snippet: Fig. 6 Steps to fabricate the hollow-core resonators. ( a ), The IP-Dip core is printed from a 3D CAD model using the Nanoscribe Photonic Professional GT2. ( b ), A sacrificial Si layer is deposited onto the core.
Techniques: